Comparison of the agglomeration behavior of thin metallic films on SiO2

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Bibliographic Details
Published in:Journal of vacuum science & technology. A, Vacuum, surfaces, and films Vacuum, surfaces, and films, 2005-07, Vol.23 (4), p.1152-1161
Main Authors: Gadkari, P. R., Warren, A. P., Todi, R. M., Petrova, R. V., Coffey, K. R.
Format: Article
Language:English
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ISSN:0734-2101
1520-8559
DOI:10.1116/1.1861943