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Manganese-induced long-range lattice disorder and vacancy formation in metal-organic chemical vapor deposition grown and ion-implanted Ga1−xMnxN

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Bibliographic Details
Published in:Journal of vacuum science & technology. A, Vacuum, surfaces, and films Vacuum, surfaces, and films, 2006-07, Vol.24 (4), p.1640-1643
Main Authors: Fenwick, William E., Asghar, Ali, Gupta, Shalini, Kang, Hun, Strassburg, Martin, Dietz, Nikolaus, Graham, Samuel, Kane, Matthew H., Ferguson, Ian T.
Format: Article
Language:English
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ISSN:0734-2101
1520-8559
DOI:10.1116/1.2201052