As-rich InAs(001)-(2×4) phases investigated by in situ surface x-ray diffraction

Surface x-ray diffraction has been employed, in situ, to measure InAs(001)-(2×4) surface phases under technologically relevant growth conditions. For the As-rich (2×4) phase, the authors obtain good agreement between the data and the β2(2×4) surface reconstruction model. Comparison of our measuremen...

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Bibliographic Details
Published in:Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena Microelectronics and nanometer structures processing, measurement and phenomena, 2008-07, Vol.26 (4), p.1516-1520
Main Authors: Tinkham, B. P., Braun, W., Ploog, K. H., Takahasi, M., Mizuki, J., Grosse, F.
Format: Article
Language:English
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Summary:Surface x-ray diffraction has been employed, in situ, to measure InAs(001)-(2×4) surface phases under technologically relevant growth conditions. For the As-rich (2×4) phase, the authors obtain good agreement between the data and the β2(2×4) surface reconstruction model. Comparison of our measurements on the (2×4) phase measured close to the metal-rich phase transition to models from density functional theory suggests a mixture of α2(2×4) and β2(2×4) surface structures present on the surface.
ISSN:1071-1023
1520-8567
DOI:10.1116/1.2918314