Multilayer high reflectance coating on polyethylene terephthalate film consisting of Ag/SiO2/TiO2 layers that are not quarter-wave thickness

A multilayer high reflectance coating consisting of Ag, SiO2, and TiO2 with Rvis of 99.3% was successfully designed by simulation based on Maxwell’s equations. The authors found that providing the low refractive index SiO2 layer with non-quarter-wave thickness (0.14 of nd/λ for 550 nm light) near th...

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Bibliographic Details
Published in:Journal of vacuum science & technology. A, Vacuum, surfaces, and films Vacuum, surfaces, and films, 2010-01, Vol.28 (1), p.99-107
Main Authors: Koike, Katsuhiko, Shimada, Koichi, Fukuda, Shin
Format: Article
Language:English
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Summary:A multilayer high reflectance coating consisting of Ag, SiO2, and TiO2 with Rvis of 99.3% was successfully designed by simulation based on Maxwell’s equations. The authors found that providing the low refractive index SiO2 layer with non-quarter-wave thickness (0.14 of nd/λ for 550 nm light) near the Ag layer made a leading contribution to this high reflectance. They successfully made a multilayer high reflectance coating of Ag/SiO2/TiO2 on polyethylene telephthalate film with Rvis of 99.4% based on that simulation. A backlight unit with a coating of Ag/SiO2/TiO2 exhibited high luminance 1.04 times that of Ag alone. Ag atoms are mixed with Si atoms upon deposit of a SiO2 layer on Ag in an atmosphere with O2. A SiO2–P layer deposited under O2 free conditions from a SiO2 ceramic target and a TiOx layer deposited from Ti work well for protection of the Ag layer from oxidation upon deposit of SiO2.
ISSN:0734-2101
1520-8559
DOI:10.1116/1.3269736