Observation of visible cathodoluminescence from Nd- and Dy-ion-implanted Si

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Bibliographic Details
Published in:Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena Microelectronics and nanometer structures processing, measurement and phenomena, 2010-03, Vol.28 (2), p.L9-L12
Main Authors: Kawai, Shinji, Ono, Kenta, Motooka, Teruaki
Format: Article
Language:English
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ISSN:1071-1023
2166-2746
1520-8567
2166-2754
DOI:10.1116/1.3298861