Carbon nanotube field emitter irradiated by proton beam

The present study adopts proton irradiation to solve the problems, such as performance degradation due to outgassing and weak adhesion, of a carbon nanotube (CNT) field emitter fabricated by the indirect coating method. The protons collide against the CNT layer and the copper film, and results in th...

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Bibliographic Details
Published in:Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena Microelectronics and nanometer structures processing, measurement and phenomena, 2010-07, Vol.28 (4), p.724-728
Main Authors: Lee, Seung-Min, Kim, Wal-Jun, Kim, Yong-Hyup, Yang, Taekeun, Han, Juneyong
Format: Article
Language:English
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Summary:The present study adopts proton irradiation to solve the problems, such as performance degradation due to outgassing and weak adhesion, of a carbon nanotube (CNT) field emitter fabricated by the indirect coating method. The protons collide against the CNT layer and the copper film, and results in thinning out of the CNTs and particle migration of the copper constituents. This process reduces the turn-on field and increases the lifetime of CNT emitters, respectively. Numerical simulations have been performed to understand the results from experiments by using a software, SRIM 2008 .
ISSN:1071-1023
2166-2746
1520-8567
2166-2754
DOI:10.1116/1.3443571