Analysis of leakage current mechanisms in RuO2–TiO2–RuO2 MIM structures

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Bibliographic Details
Published in:Journal of vacuum science and technology. B, Nanotechnology & microelectronics Nanotechnology & microelectronics, 2011-01, Vol.29 (1), p.1
Main Authors: Racko, J., Mikolášek, M., Harmatha, L., Breza, J., Hudec, B., Fröhlich, K., Aarik, J., Tarre, A., Granzner, R., Schwierz, F.
Format: Article
Language:English
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ISSN:2166-2746
2166-2754
DOI:10.1116/1.3534022