Characteristics of PMN-PZT ferroelectric electron emitters with three-dimensional emission sites formed by chemical etching

Pb(Mg1/3N2/3)O3-PbZrO3-PbTiO3 (PMN-PZT) ferroelectric electron emitters with a novel electrode structures were formed by photolithography and chemical etching to investigate their electron emission characteristics. For the electron emitter formed with the most suitable etching time, the electron emi...

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Published in:Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena Microelectronics and nanometer structures processing, measurement and phenomena, 2011-05, Vol.29 (3)
Main Authors: Sugiyama, Tomohiko, Ohwada, Iwao, Nanataki, Tsutomu, Moriguchi, Yukihisa, Eryu, Osamu, Ichimura, Masaya, Gomi, Manabu
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Language:English
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container_title Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena
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creator Sugiyama, Tomohiko
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description Pb(Mg1/3N2/3)O3-PbZrO3-PbTiO3 (PMN-PZT) ferroelectric electron emitters with a novel electrode structures were formed by photolithography and chemical etching to investigate their electron emission characteristics. For the electron emitter formed with the most suitable etching time, the electron emission density was 17   nC / cm 2 . An electric potential distribution was simulated to clarify the effects of the vacuum gap, and results confirmed that the vacuum gap produces an electric field that leads electrons from the ferroelectric surface to the surrounding space.
doi_str_mv 10.1116/1.3592993
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title Characteristics of PMN-PZT ferroelectric electron emitters with three-dimensional emission sites formed by chemical etching
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