Dynamic characteristics control of DLC nano-resonator fabricated by focused-ion-beam chemical vapor deposition

The authors fabricated a resonant frequency-tunable diamondlike carbon (DLC) resonator by focused-ion-beam chemical vapor deposition and a wet-etching process for fabrication of a functional resonant device. The resonant frequency of the DLC resonator with a cantilever shape was controlled electrica...

Full description

Saved in:
Bibliographic Details
Published in:Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena Microelectronics and nanometer structures processing, measurement and phenomena, 2011-11, Vol.29 (6), p.06FE03-06FE03-4
Main Authors: Kometani, Reo, Nishi, Shunjiro, Warisawa, Shin’ichi, Ishihara, Sunao
Format: Article
Language:English
Citations: Items that this one cites
Items that cite this one
Online Access:Get full text
Tags: Add Tag
No Tags, Be the first to tag this record!
Description
Summary:The authors fabricated a resonant frequency-tunable diamondlike carbon (DLC) resonator by focused-ion-beam chemical vapor deposition and a wet-etching process for fabrication of a functional resonant device. The resonant frequency of the DLC resonator with a cantilever shape was controlled electrically via the electrostatic attractive force generated by the opposite electrode. As a result, we achieved an extremely large resonant frequency tuning ratio of approximately 730%. This indicates that the electrostatic attractive force, when added to the restorative force of the DLC resonator, works effectively to change the resonant frequency.
ISSN:1071-1023
2166-2746
1520-8567
2166-2754
DOI:10.1116/1.3662493