Synthesis and deposition of metal nanoparticles by gas condensation process

In this work, the synthesis of Pt and Ag nanoparticles by means of the inert gas phase condensation of sputtered atomic vapor is presented. The process parameters (power, sputtering time, and gas flow) were varied in order to study the relationship between deposition conditions and properties of the...

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Bibliographic Details
Published in:Journal of vacuum science & technology. A, Vacuum, surfaces, and films Vacuum, surfaces, and films, 2014-03, Vol.32 (2)
Main Authors: Maicu, Marina, Schmittgens, Ralph, Hecker, Dominic, Glöß, Daniel, Frach, Peter, Gerlach, Gerald
Format: Article
Language:English
Subjects:
CHEMICAL VAPOR DEPOSITION
COATINGS
COMPOSITE MATERIALS
CONDENSED MATTER PHYSICS, SUPERCONDUCTIVITY AND SUPERFLUIDITY
GAS FLOW
MATRIX MATERIALS
NANOSCIENCE AND NANOTECHNOLOGY
NANOSTRUCTURES
PARTICLES
PLASMA
SPUTTERING
SYNTHESIS
THIN FILMS
VAPORS
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Summary:In this work, the synthesis of Pt and Ag nanoparticles by means of the inert gas phase condensation of sputtered atomic vapor is presented. The process parameters (power, sputtering time, and gas flow) were varied in order to study the relationship between deposition conditions and properties of the nanoparticles such as their quantity, size, and size distribution. Moreover, the gas phase condensation process can be combined with a plasma enhanced chemical vapor deposition procedure in order to deposit nanocomposite coatings consisting of metallic nanoparticles embedded in a thin film matrix material. Selected examples of application of the generated nanoparticles and nanocomposites are discussed.
ISSN:0734-2101
1520-8559
DOI:10.1116/1.4859260