Fabrication of pyramidal probes with various periodic patterns and a single nanopore

• Published in: Journal of vacuum science and technology. B, Nanotechnology & microelectronics Nanotechnology & microelectronics, 2015-11, Vol.33 (6)
• Main Authors: Choi, Seong Soo, Park, Myoung Jin, Han, Chul Hee, Oh, Sae Joong, Han, Sang Hun, Park, Nam Kyou, Kim, Yong-Sang, Choo, Hyuck
• Format: Article
• Language: English
• ISSN: 2166-2746; 2166-2754
• DOI: 10.1116/1.4935560

The nanometer-scale patterned pyramidal probe with an electron beam-induced nanopore on the pyramid apex is an excellent candidate for an optical biosensor. The nanoapertures surrounded with various periodic groove patterns on the pyramid sides were fabricated using a focused ion beam technique, where the optical characteristics of the fabricated apertures with rectangular, circular, and elliptical groove patterns were investigated. The elliptical groove patterns on the pyramid were designed to maintain an identical distance between the grooves and the apex for the surface waves and, among the three patterns, the authors observed the highest optical transmission from the elliptically patterned pyramidal probe. A 103-fold increase of the transmitted optical intensity was observed after patterning with elliptical grooves, even without an aperture on the pyramid apex. The nanopore on the apex of the pyramid was fabricated using electron beam irradiation and was optically characterized.