Ga+ focused ion beam lithography as a viable alternative for multiple fin field effect transistor prototyping

A novel method for fast and flexible fin field effect transistor (FinFET) prototyping using a Ga+ focused ion beam is presented. The fin width and height control is explored, aiming for the successful fabrication of prototypes. This method results in fins with negligible Ga incorporation, when compa...

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Bibliographic Details
Published in:Journal of vacuum science and technology. B, Nanotechnology & microelectronics Nanotechnology & microelectronics, 2016-11, Vol.34 (6)
Main Authors: Leonhardt, Alessandra, Puydinger dos Santos, Marcos Vinicius, Diniz, José Alexandre, Manera, Leandro Tiago, Lima, Lucas Petersen Barbosa
Format: Article
Language:English
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Summary:A novel method for fast and flexible fin field effect transistor (FinFET) prototyping using a Ga+ focused ion beam is presented. The fin width and height control is explored, aiming for the successful fabrication of prototypes. This method results in fins with negligible Ga incorporation, when compared to traditional focused ion beam milling techniques. Our method for multiple fin FinFET prototyping enables advanced device fabrication and great flexibility regarding both the number of fins and fin width. Working FinFET prototypes have been fabricated using the proposed fin definition method, and the electrical characterization is discussed.
ISSN:2166-2746
2166-2754
DOI:10.1116/1.4963879