Mass ablated controlled laser induced V2O5 plasma parameters for controllable VO2 films growth

The effect of the laser fluence on V2O5 plasma dynamics, composition, and ionization state was studied. By combining three plasma diagnostic techniques, fast imaging, optical emission spectroscopy, and Langmuir probe, two ablation regimes have been identified. These ablation regimes depend on the ev...

Full description

Saved in:
Bibliographic Details
Published in:Journal of vacuum science & technology. A, Vacuum, surfaces, and films Vacuum, surfaces, and films, 2019-01, Vol.37 (1)
Main Authors: Lafane, Slimane, Abdelli-Messaci, Samira, Kechouane, Mohamed, Ngom, Balla Diop, Malek, Smail, Guedouar, Bendiba, Kerdja, Tahar
Format: Article
Language:English
Citations: Items that this one cites
Items that cite this one
Online Access:Get full text
Tags: Add Tag
No Tags, Be the first to tag this record!
Description
Summary:The effect of the laser fluence on V2O5 plasma dynamics, composition, and ionization state was studied. By combining three plasma diagnostic techniques, fast imaging, optical emission spectroscopy, and Langmuir probe, two ablation regimes have been identified. These ablation regimes depend on the evolution of the amount of the ablated mass that was measured by the method of mass loss. The transition between the two regimes at 1.3 J cm−2. For fluences lower than this threshold value, the expansion velocity of the plasma elements, the plasma dimensions, and the ionic current increase rapidly, unlike the fluences higher than the threshold fluence. Reverse behavior was observed for the ablated mass. This effect of the ablated mass would have a significant impact on the control of the properties of vanadium dioxide layers deposited by pulsed laser deposition in a reactive atmosphere of oxygen.
ISSN:0734-2101
1520-8559
DOI:10.1116/1.5053981