Characterization of field emission cathodes with different forms of diamond coatings

The emission of different diamond coatings on silicon field emitter arrays were investigated: chemical vapor deposition diamond, high pressure and high temperature synthetic diamond, and shock-synthesized nanodiamond. Practical emission characteristics such as: emission threshold, maximum current, c...

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Bibliographic Details
Published in:Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures 1999-03, Vol.17 (2), p.666-669
Main Authors: Zhirnov, V. V., Küttel, O. M., Gröning, O., Alimova, A. N., Detkov, P. Y., Belobrov, P. I., Maillard-Schaller, E., Schlapbach, L.
Format: Article
Language:English
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Summary:The emission of different diamond coatings on silicon field emitter arrays were investigated: chemical vapor deposition diamond, high pressure and high temperature synthetic diamond, and shock-synthesized nanodiamond. Practical emission characteristics such as: emission threshold, maximum current, current stability, and reproducibility were tested. The effects of surface modification, the size of diamond crystallites, and hydrogen plasma treatments were also studied.
ISSN:0734-211X
1071-1023
1520-8567
DOI:10.1116/1.590614