On the origins of the m/z = 19 signals in residual gas analysis

Previous investigations of mass spectra obtained in very high vacuum systems have disagreed as to the origin and identity of the mass peak frequently observed at m/z = 19 amu. Recent work with quadrupole mass spectrometry instruments that can also be used for threshold ionization mass spectrometry h...

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Bibliographic Details
Published in:Journal of vacuum science and technology. B, Nanotechnology & microelectronics Nanotechnology & microelectronics, 2023-07, Vol.41 (4)
Main Authors: Davies, Sean, Walker, Dane E., Rees, John A., Seymour, David L.
Format: Article
Language:English
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Summary:Previous investigations of mass spectra obtained in very high vacuum systems have disagreed as to the origin and identity of the mass peak frequently observed at m/z = 19 amu. Recent work with quadrupole mass spectrometry instruments that can also be used for threshold ionization mass spectrometry has shown how the apparent conflict between different sets of published data may be resolved.
ISSN:2166-2746
2166-2754
DOI:10.1116/6.0002498