A novel design of a retarding field electron energy analyzer with a cavity electrode providing extremely high energy resolution

An electron energy analyzer based on the retarding electrostatic field generated by a cavity electrode was prototyped, where the designed energy resolution is smaller than 10 meV at acceleration voltages Vo less than 5 kV and a half angle spread θo less than 20 mrad for the incident electron beams w...

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Bibliographic Details
Published in:Journal of vacuum science and technology. B, Nanotechnology & microelectronics Nanotechnology & microelectronics, 2023-07, Vol.41 (4)
Main Authors: Honda, Kazuhiro, Ito, Hiroyuki, Katagiri, Souichi, Doi, Takashi, Sasaki, Masahiro
Format: Article
Language:English
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Summary:An electron energy analyzer based on the retarding electrostatic field generated by a cavity electrode was prototyped, where the designed energy resolution is smaller than 10 meV at acceleration voltages Vo less than 5 kV and a half angle spread θo less than 20 mrad for the incident electron beams with the scanning voltage range of 3 V. Precise energy resolution, however, has not been recognized experimentally because of the difficulties of equipping such a narrow energy spread electron source. This paper describes the principle of the newly developed energy analyzer and shows the obtained energy spectra from a Schottky emitter ZrO/W(100) with a tip of the curvature radius of 1.5 μm, which could highly reproduce the theoretically expected spectra at various emitter temperatures because of its predominantly thermal emission.
ISSN:2166-2746
2166-2754
DOI:10.1116/6.0002597