HAXPES reference spectra of In, Sn, and ITO with Cr Kα excitation

Hard x-ray photoelectron spectroscopy using monochromatic Cr Kα radiation (5414.8 eV) has been used to acquire XPS and Auger data on sputtered In, Sn, and ITO samples. Survey data, high-resolution scans of all observed photoelectron peaks, and high-resolution scans of Auger lines are presented herei...

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Bibliographic Details
Published in:Surface science spectra 2024-06, Vol.31 (1)
Main Authors: Zheng, Dong, Young, Christopher N., Stickle, William F.
Format: Article
Language:English
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Summary:Hard x-ray photoelectron spectroscopy using monochromatic Cr Kα radiation (5414.8 eV) has been used to acquire XPS and Auger data on sputtered In, Sn, and ITO samples. Survey data, high-resolution scans of all observed photoelectron peaks, and high-resolution scans of Auger lines are presented herein.
ISSN:1055-5269
1520-8575
DOI:10.1116/6.0003489