New compensating four-phase algorithm for phase-shift interferometry

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Bibliographic Details
Published in:Optical Engineering 1993, Vol.32 (8), p.1883-1885
Main Authors: Schwider, Johannes, Falkenstoerfer, Oliver R, Schreiber, Horst, Zoeller, Andreas, Streibl, Norbert
Format: Article
Language:English
Subjects:
Exact sciences and technology
Instruments, apparatus, components and techniques common to several branches of physics and astronomy
Interferometers
Optical instruments, equipment and techniques
Physics
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ISSN:0091-3286
1560-2303
DOI:10.1117/12.143340