Determination Of Thickness Errors And Boundary Roughness From The Measured Performance Of A Multilayer Coating

The influence of thickness errors and boundary imperfections on the performance of a multilayer x-ray mirror is discussed, and it is shown that both can be obtained separately from a measured reflectivity curve at a short x-ray wavelength. Multilayers have greatly reduced scattering compared to sing...

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Bibliographic Details
Published in:Optical Engineering 1986-08, Vol.25 (8), p.258954-258954
Main Authors: Spiller, Eberhard, Rosenbluth, Alan E
Format: Article
Language:English
Subjects:
Exact sciences and technology
Instruments, apparatus, components and techniques common to several branches of physics and astronomy
Physics
X- and γ-ray instruments and techniques
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Summary:The influence of thickness errors and boundary imperfections on the performance of a multilayer x-ray mirror is discussed, and it is shown that both can be obtained separately from a measured reflectivity curve at a short x-ray wavelength. Multilayers have greatly reduced scattering compared to single films, and for this reason rough boundaries and gradual transition layers between the film materials give practically identical performance. A simple Debye-Waller factor is not sufficient to describe the performance of a multi-layer with many layers at short wavelengths.
ISSN:0091-3286
1560-2303
DOI:10.1117/12.7973935