Optical waveguide components with high refractive index difference in silicon-oxynitride for application in integrated optoelectronics

Planar optical waveguide structures in communication network applications require a number of indispensable features, e.g., low insertion loss, efficient fiber-to-chip coupling, polarization independent operation, and high integration density, as well as reliable and cost-efficient fabrication. The...

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Bibliographic Details
Published in:Optical Engineering 2002-01, Vol.41 (1), p.237-243
Main Authors: Schauwecker, Bernd, Arnold, Michael, Radehaus, Christian V, Przyrembel, Georges, Kuhlow, Berndt
Format: Article
Language:English
Subjects:
coupler
integrated optical component
Mach-Zehnder interferometer
planar waveguide
silicon-oxynitride
waveguide component
Y-branch
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Summary:Planar optical waveguide structures in communication network applications require a number of indispensable features, e.g., low insertion loss, efficient fiber-to-chip coupling, polarization independent operation, and high integration density, as well as reliable and cost-efficient fabrication. The presented concept of integrated optical waveguide structures is based on the high refractive index material system of silicon-oxynitride on silicon. This system has the potential to meet all mentioned requirements. We describe the design and fabrication of such waveguide structures and demonstrate basic integrated optical components with good performance. ©
ISSN:0091-3286
1560-2303
DOI:10.1117/1.1419188