Acoustical properties characterization of a composite made of SU-8 and nanoparticules for BioMEMS application

• Main Authors: Carlier, Julien, Campistron, Pierre, Callens, Dorothée, Soyer, Caroline, Nongaillard, Bertrand, Wang, Shengxiang, Zhao, Xingzhong
• Format: Conference Proceeding
• Language: English
• ISSN: 0001-4966; 1520-8524
• DOI: 10.1121/1.2934923

The photoresist SU-8 (often used in microtechnology) has been acoustically characterized at the frequency of 1 GHz thanks to ZnO transducers. This material will be used to achieve acoustical matching between silicon and water at this frequency and a gain of about 5 dB has been obtained using the combination of this material with a silicon oxyde layer. The acoustical characterization of a composite material made of this photoresist SU-8 doped with nanoparticules (TiO2 for example) is also presented. The aim is to achieve matching layers with specific mechanical impedance around 5 MRay and depending on the nanoparticules concentration. The targeted application concerns the integration of high frequency ultrasonic transducer in Lab-on-Chip for biological cell characterization, especially adhesion properties or biological cells mechanical behaviour. The mechanical impedance and the attenuation of this composite material are characterized around 1 GHz thanks to a standing wave ratio method measuring S11 parameter and extracting the targeted parameters thanks to signal processing.