Silicon and phosphorus co-implantation into undoped and indium-doped GaAs substrates

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Bibliographic Details
Published in:Semiconductors (Woodbury, N.Y.) N.Y.), 1997-12, Vol.31 (12), p.1217-1220
Main Authors: Dymova, N. N., Kunitsyn, A. E., Chaldyshev, V. V., Markov, A. V.
Format: Article
Language:English
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ISSN:1063-7826
1090-6479
DOI:10.1134/1.1187296