Silicon and phosphorus co-implantation into undoped and indium-doped GaAs substrates

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Published in:Semiconductors (Woodbury, N.Y.) N.Y.), 1997-12, Vol.31 (12), p.1217-1220
Main Authors: Dymova, N. N., Kunitsyn, A. E., Chaldyshev, V. V., Markov, A. V.
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Language:English
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title Silicon and phosphorus co-implantation into undoped and indium-doped GaAs substrates
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