Properties of periodic α-Si:H/a-SiNx:H structures obtained by nitridization of amorphoussilicon layers

Saved in:
Bibliographic Details
Published in:Semiconductors (Woodbury, N.Y.) N.Y.), 1998-03, Vol.32 (3), p.297-301
Main Authors: Bilenko, D. I., Belobrovaya, O. Ya, Galishnikova, Yu. N., Zharkova, É. A., Kazanova, N. P., Koldobanova, O. Yu, Khasina, E. I.
Format: Article
Language:English
Citations: Items that this one cites
Online Access:Get full text
Tags: Add Tag
No Tags, Be the first to tag this record!
Description
Summary:
ISSN:1063-7826
1090-6479
DOI:10.1134/1.1187381