Analysis of structural defects in boron-implanted silicon single crystals on the basis of the results of double-and triple-crystal x-ray diffractometry

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Published in:Technical physics 1998-06, Vol.43 (6), p.696-700
Main Authors: Petrakov, A. P., Tikhonov, N. A., Shilov, S. V.
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Language:English
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title Analysis of structural defects in boron-implanted silicon single crystals on the basis of the results of double-and triple-crystal x-ray diffractometry
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