Synthesis of ordinary-and inclined-texture zinc oxide films in an inhomogeneous gas-discharge plasma

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Bibliographic Details
Published in:Technical physics 2000-01, Vol.45 (4), p.497-500
Main Authors: Veselov, A. G., Dzhumaliev, A. S.
Format: Article
Language:English
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ISSN:1063-7842
1090-6525
DOI:10.1134/1.1259662