Flexural vibrations of semiconductor wafers in the presence of a pulsed thermal excitation source

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Bibliographic Details
Published in:Technical physics letters 1999-03, Vol.25 (3), p.191-193
Main Authors: Orlov, A. M., Skvortsov, A. A., Pirogov, A. V., Frolov, V. A.
Format: Article
Language:English
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ISSN:1063-7850
1090-6533
DOI:10.1134/1.1262418