Structural defects in 6H-SiC substrates and their effect on the sublimation growth of epitaxial layers in vacuum

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Bibliographic Details
Published in:Physics of the solid state 2000-08, Vol.42 (8), p.1422-1426
Main Authors: Sorokin, L. M., Tregubova, A. S., Shcheglov, M. P., Lebedev, A. A., Savkina, N. S.
Format: Article
Language:English
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ISSN:1063-7834
1090-6460
DOI:10.1134/1.1307045