Kinetics of the reactions involving CF2 and CF in a pure tetrafluoromethane plasma: I. Production of CF2 and CF via electron-impact dissociation

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Bibliographic Details
Published in:Plasma physics reports 2002-03, Vol.28 (3), p.229-242
Main Authors: Ivanov, V. V., Klopovskii, K. S., Lopaev, D. V., Proshina, O. V., Rakhimov, A. T., Rakhimova, T. V., Rulev, G. B.
Format: Article
Language:English
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ISSN:1063-780X
1562-6938
DOI:10.1134/1.1458988