Subthreshold sputtering at high temperatures

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Bibliographic Details
Published in:JETP letters 2003-01, Vol.77 (7), p.362-365
Main Authors: Guseva, M. I., Gureev, V. M., Kolbasov, B. N., Korshunov, S. N., Martynenko, Yu. V., Petrov, V. B., Khripunov, B. I.
Format: Article
Language:English
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ISSN:0021-3640
1090-6487
DOI:10.1134/1.1581961