Photoluminescence and structural defects in silicon layers implanted by iron ions

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Bibliographic Details
Published in:Physics of the solid state 2004-01, Vol.46 (1), p.22-26
Main Authors: Shteinman, É. A., Vdovin, V. I., Izotov, A. N., Parkhomenko, Yu. N., Borun, A. F.
Format: Article
Language:English
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ISSN:1063-7834
1090-6460
DOI:10.1134/1.1641913