Formation of two-dimensional photonic-crystal structures in silicon for near-infrared region using fine focused ion beams

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Bibliographic Details
Published in:Physics of the solid state 2004-01, Vol.46 (1), p.32-34
Main Authors: Vyatkin, A. F., Gavrilin, E. Yu, Gorbatov, Yu. B., Starkov, V. V., Sirotkin, V. V.
Format: Article
Language:English
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ISSN:1063-7834
1090-6460
DOI:10.1134/1.1641915