Formation of higher manganese silicide films on silicon

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Bibliographic Details
Published in:Technical physics 2005-08, Vol.50 (8), p.1102-1104
Main Authors: Kamilov, T. S., Kabilov, D. K., Samiev, I. S., Khusnutdinova, Kh. Kh, Muminov, R. A., Klechkovskaya, V. V.
Format: Article
Language:English
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ISSN:1063-7842
1090-6525
DOI:10.1134/1.2014547