Influence of a DC field on the near-electrode zone of nonuniform microwave discharge in hydrogen

We investigate, by the emission spectroscopy, the influence of the DC electric field on the nearsur-face plasma of the electrode microwave hydrogen discharge (EMD) at pressures of 1 to 5 Torr. We obtain the DC current-voltage characteristics of the EMD, the strength values of the microwave field, an...

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Bibliographic Details
Published in:High temperature 2014-03, Vol.52 (2), p.150-156
Main Authors: Lebedev, Yu. A., Epstein, I. L., Yusupova, E. V.
Format: Article
Language:English
Subjects:
Atoms and Molecules in Strong Fields
Classical and Continuum Physics
Industrial Chemistry/Chemical Engineering
Laser Matter Interaction
Materials Science
Physical Chemistry
Physics
Physics and Astronomy
Plasma Investigations
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Summary:We investigate, by the emission spectroscopy, the influence of the DC electric field on the nearsur-face plasma of the electrode microwave hydrogen discharge (EMD) at pressures of 1 to 5 Torr. We obtain the DC current-voltage characteristics of the EMD, the strength values of the microwave field, and its spatial distributions in the EMD near-electrode zone. Under a positive voltage on the electrode as against the chamber, the variation in the discharge structure are minor, and, at the particular voltages depending on the pressure and the microwave power, the spatial charge layer breakdown takes place near the discharge chamber surface. Under a negative voltage on the electrode (the plasma cathode microwave mode), the discharge structure and dimensions vary and, at high currents, the discharge cancels.
ISSN:0018-151X
1608-3156
DOI:10.1134/S0018151X14020138