Properties of BC x N y films grown by plasma-enhanced chemical vapor deposition from N-trimethylborazine-nitrogen mixtures

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Bibliographic Details
Published in:Inorganic materials 2010-05, Vol.46 (5), p.487-494
Main Authors: Sulyaeva, V. S., Kosinova, M. L., Rumyantsev, Yu. M., Golubenko, A. N., Fainer, N. I., Alferova, N. I., Ayupov, B. M., Gevko, P. N., Kesler, V. G., Kolesov, B. A., Maksimovskii, E. A., Myakishev, K. G., Yushina, I. V., Kuznetsov, F. A.
Format: Article
Language:English
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ISSN:0020-1685
1608-3172
DOI:10.1134/S0020168510050092