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Chemical Vapor Deposition of an Iridium Phase on Hafnium Carbide and Tantalum Carbide

Nanocrystalline iridium coatings on hafnium carbide and tantalum carbide substrates are prepared by chemical vapor deposition (MOCVD) at 600°С. Subsequent high-temperature treatment at 1100°С gives rise to chemical reactions between iridium and hafnium carbide or tantalum carbide to yield nanosized...

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Bibliographic Details
Published in:Russian journal of inorganic chemistry 2020-11, Vol.65 (11), p.1781-1788
Main Authors: Lozanov, V. V., Il’in, I. Yu, Morozova, N. B., Trubin, S. V., Baklanova, N. I.
Format: Article
Language:English
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Summary:Nanocrystalline iridium coatings on hafnium carbide and tantalum carbide substrates are prepared by chemical vapor deposition (MOCVD) at 600°С. Subsequent high-temperature treatment at 1100°С gives rise to chemical reactions between iridium and hafnium carbide or tantalum carbide to yield nanosized substitutional intermetallic solid solutions MIr 3 –   x and evolve free carbon. The occurrence of intermetallic interaction is proved by X-ray photoelectron (XPS) spectroscopy.
ISSN:0036-0236
1531-8613
DOI:10.1134/S0036023620110108