X-ray masks based on epoxygraphite

A simple fabrication technology of hard X-ray masks with thin (50–150μm thick) X-ray transparent bearing membranes made of a new material, i.e., polymerized epoxy resin with graphite filler (hereafter, epoxygraphite), is described. The first results of using such masks in pattern scanning synchrotro...

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Bibliographic Details
Published in:Surface investigation, x-ray, synchrotron and neutron techniques x-ray, synchrotron and neutron techniques, 2013-11, Vol.7 (6), p.1261-1269
Main Authors: Gentselev, A. N., Zelinsky, A. G., Kondratyev, V. I.
Format: Article
Language:English
Subjects:
Chemistry and Materials Science
Materials Science
Surfaces and Interfaces
Thin Films
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Description
Summary:A simple fabrication technology of hard X-ray masks with thin (50–150μm thick) X-ray transparent bearing membranes made of a new material, i.e., polymerized epoxy resin with graphite filler (hereafter, epoxygraphite), is described. The first results of using such masks in pattern scanning synchrotron X-ray lithography in the exposing radiation wavelength range λ ≈ 0.5–3 Å are presented. The prospects of applications of such masks in the softer spectral range λ ≈ 3–7 Å are considered.
ISSN:1027-4510
1819-7094
DOI:10.1134/S1027451013130065