New method for the Langmuir probe diagnostics of polymerizing plasmas

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Bibliographic Details
Published in:Russian microelectronics 2007-02, Vol.36 (1), p.14-26
Main Authors: Rudenko, K. V., Myakon’kikh, A. V., Orlikovsky, A. A., Pustovit, A. N.
Format: Article
Language:English
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ISSN:1063-7397
1608-3415
DOI:10.1134/S1063739707010027