Methods of parallel integration of carbon nanotubes during the formation of functional devices for microelectronics and sensor technologies

Methods of formation of thin film structures and sensor elements based on carbon nanotubes have been developed. Methods of integration using deposition from solutions, probe micromechanics and the electrokinetic positioning of nanotubes providing compatibility with traditional microelectronic techno...

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Bibliographic Details
Published in:Russian microelectronics 2009-09, Vol.38 (5), p.320-326
Main Author: Bobrinetskii, I. I.
Format: Article
Language:English
Subjects:
Electrical Engineering
Engineering
Production-Process Dynamics
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Summary:Methods of formation of thin film structures and sensor elements based on carbon nanotubes have been developed. Methods of integration using deposition from solutions, probe micromechanics and the electrokinetic positioning of nanotubes providing compatibility with traditional microelectronic technology, are suggested. Peculiarities of the parallel integration of carbon nanotubes in the process of formation of thin films, networks, and individual conduction channels are revealed.
ISSN:1063-7397
1608-3415
DOI:10.1134/S1063739709050047