Sensor based on silicon microchannel resistor

The work presented here is on manufacturing a sensing structure based on ordered microchannel silicon, for electrophysical detection of liquids. The behavior in time of various organic and inorganic matter (deionized water, ethanol, aqueous ethanol solutions, acetic acid, and ammonium hydroxide) app...

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Bibliographic Details
Published in:Russian microelectronics 2013, Vol.42 (1), p.16-26
Main Authors: Parashchenko, M. A., Vandysheva, N. V., Kirienko, V. V., Filippov, N. S., Romanov, S. I.
Format: Article
Language:English
Subjects:
Electrical Engineering
Engineering
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Summary:The work presented here is on manufacturing a sensing structure based on ordered microchannel silicon, for electrophysical detection of liquids. The behavior in time of various organic and inorganic matter (deionized water, ethanol, aqueous ethanol solutions, acetic acid, and ammonium hydroxide) applied to a porous body was studied by the method of measuring the conductivity of a microchannel membrane (a sensing element of a sensor). It was found that a microchannel resistor had a specific response for any liquid applied drop-wise to the sensing element. The proposed electrophysical method allowed us to identify the liquids with which the sensor interacted.
ISSN:1063-7397
1608-3415
DOI:10.1134/S1063739713010046