Homogeneous deposition of nickel in pores of the ordered thin aluminum oxide

Fabrication of a matrix of ordered vertically oriented nickel nanocolumns with the use of a porous aluminum oxide template is considered. The effect of thinning of a barrier layer at the bottom of the aluminum oxide pores on the nucleation and growth of ordered metal nanocolumns is discussed. Morpho...

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Bibliographic Details
Published in:Russian microelectronics 2013-03, Vol.42 (2), p.79-88
Main Authors: Vorob’eva, A. I., Utkina, E. A., Komar, O. M.
Format: Article
Language:English
Subjects:
Electrical Engineering
Engineering
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Summary:Fabrication of a matrix of ordered vertically oriented nickel nanocolumns with the use of a porous aluminum oxide template is considered. The effect of thinning of a barrier layer at the bottom of the aluminum oxide pores on the nucleation and growth of ordered metal nanocolumns is discussed. Morphological parameters of Ni nanocolumns fabricated in different regimes are studied by atomic force microscopy. Kinetic regulations and conditions of the electrochemical deposition of nickel into a porous aluminum oxide template are investigated.
ISSN:1063-7397
1608-3415
DOI:10.1134/S106373971301006X