Properties of zinc oxide films synthesized in low-temperature plasma discharge under conditions of bombardment with plasma components

Optical and structural properties of thin films of zinc oxide synthesized under the conditions of bombardment with components of a low-temperature plasma are studied. The films were synthesized on a cold substrate located at a distance from the target comparable to the free-path length of particles...

Full description

Saved in:
Bibliographic Details
Published in:Semiconductors (Woodbury, N.Y.) N.Y.), 2008-04, Vol.42 (4), p.486-489
Main Authors: Serdobintsev, A. A., Veselov, A. G., Kiryasova, O. A.
Format: Article
Language:English
Subjects:
Fabrication
Magnetic Materials
Magnetism
Physics
Physics and Astronomy
Testing of Materials and Structures
Treatment
Citations: Items that this one cites
Items that cite this one
Online Access:Get full text
Tags: Add Tag
No Tags, Be the first to tag this record!
Description
Summary:Optical and structural properties of thin films of zinc oxide synthesized under the conditions of bombardment with components of a low-temperature plasma are studied. The films were synthesized on a cold substrate located at a distance from the target comparable to the free-path length of particles knocked from the target. The refractive index, optical band gap, and interlayer spacing for the films under study are determined. It is found that these parameters depend on the free-path length of the particles, controlled by pressure in the sputtering chamber. Consistent correlation is found between the films’ parameters and the bombardment intensity. A qualitative explanation of the phenomena observed is suggested; this explanation is based on an analysis of the energy conditions of the film’s synthesis.
ISSN:1063-7826
1090-6479
DOI:10.1134/S1063782608040209