Light-enhanced sensitivity of SnO2 − x gas sensors

The effect of emission of red, yellow, green, and blue LEDs on the sensitivity of SnO 2 -film gas sensors manufactured by a reactive magnetron sputtering with addition of Sb, In, and catalytic coatings of Pt and Pd to vapors of ethyl and isopropyl spirits, acetone, and benzene is investigated. For t...

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Bibliographic Details
Published in:Semiconductors (Woodbury, N.Y.) N.Y.), 2008-06, Vol.42 (6), p.726-730
Main Authors: Gulyaev, A. M., Van, Le Van, Sarach, O. B., Mukhina, O. B.
Format: Article
Language:English
Subjects:
Magnetic Materials
Magnetism
Physics
Physics and Astronomy
Physics of Semiconductor Devices
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Summary:The effect of emission of red, yellow, green, and blue LEDs on the sensitivity of SnO 2 -film gas sensors manufactured by a reactive magnetron sputtering with addition of Sb, In, and catalytic coatings of Pt and Pd to vapors of ethyl and isopropyl spirits, acetone, and benzene is investigated. For the first time, it is shown that all types of emission for all listed reactants increase the sensor sensitivity by 2 to 100 times in the case of small (1–10 ppm) doses of all reactants for the sensors, which are low-sensitive without illumination. It is found that the character of dependence of the sensor sensitivity on the illumination intensity is determined by the type of the catalytic coating, linearly growing in the case of Pd and sharply increasing at the highest intensity in the case of Pt. The nature of this phenomenon is discussed taking into account the vapor adsorption and the conductivity of crystallites in tin-dioxide films.
ISSN:1063-7826
1090-6479
DOI:10.1134/S1063782608060158