Effect of oxygen pressure on the texture of a magnetite film grown by reactive deposition on a SiO2/Si(001) surface

Magnetite films (Fe 3 O 4 ) 75 nm thick were grown on an oxidized Si(001) surface using reactive iron deposition in an oxygen atmosphere. Iron oxide films were grown under different O 2 pressures. The structure of the films was controlled during their growth by the reflection high-energy electron di...

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Bibliographic Details
Published in:Physics of the solid state 2015-12, Vol.57 (12), p.2532-2536
Main Authors: Balashev, V. V., Vikulov, V. A., Pisarenko, T. A., Korobtsov, V. V.
Format: Article
Language:English
Subjects:
Physics
Physics and Astronomy
Solid State Physics
Surface Physics and Thin Films
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Summary:Magnetite films (Fe 3 O 4 ) 75 nm thick were grown on an oxidized Si(001) surface using reactive iron deposition in an oxygen atmosphere. Iron oxide films were grown under different O 2 pressures. The structure of the films was controlled during their growth by the reflection high-energy electron diffraction (RHEED) method. It was established that the growth of magnetite films with a texture occurs only in a specific range of O 2 pressures. A decrease in oxygen pressure led to the growth of a Fe 3 O 4 film without a texture, while reactive deposition under pressures above the upper limit of the aforementioned range resulted in the formation of hematite crystallites (α-Fe 2 O 3 ) in the Fe 3 O 4 film.
ISSN:1063-7834
1090-6460
DOI:10.1134/S1063783415120070