Refractive index and lattice constant of zinc oxide films modified in a low-temperature plasma

The crystallographic and optical properties of ZnO films obtained in the recombination burning zone of a low-temperature plasma are investigated. The refractive index is determined, and its correlation with the lattice constant along the c axis is found. A planar homogeneous structure consisting of...

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Bibliographic Details
Published in:Technical physics 2008-03, Vol.53 (3), p.368-370
Main Authors: Serdobintsev, A. A., Burylin, E. I., Veselov, A. G., Kiryasova, O. A., Dzhumaliev, A. S.
Format: Article
Language:English
Subjects:
Classical and Continuum Physics
Physics
Physics and Astronomy
Short Communications
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Summary:The crystallographic and optical properties of ZnO films obtained in the recombination burning zone of a low-temperature plasma are investigated. The refractive index is determined, and its correlation with the lattice constant along the c axis is found. A planar homogeneous structure consisting of two ZnO films with different refractive indices is fabricated to demonstrate areas of application of the technique suggested.
ISSN:1063-7842
1090-6525
DOI:10.1134/S1063784208030146