Magnetic activity of Permalloy films grown in the recombination burning zone of a low-temperature plasma

The magnetic properties of Permalloy films are studied as a function of substrate bombardment rate in the process of film synthesis in the recombination burning region of a glow discharge. An unambiguous relationship is found between the film properties and recombination burning intensity. By reconf...

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Bibliographic Details
Published in:Technical physics 2008-03, Vol.53 (3), p.385-387
Main Authors: Aleksandrov, V. A., Veselov, A. G.
Format: Article
Language:English
Subjects:
Classical and Continuum Physics
Physics
Physics and Astronomy
Short Communications
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Summary:The magnetic properties of Permalloy films are studied as a function of substrate bombardment rate in the process of film synthesis in the recombination burning region of a glow discharge. An unambiguous relationship is found between the film properties and recombination burning intensity. By reconfiguring the recombination region, optimal conditions were found for the synthesis of 30-to 60-nm-thick films with a spread in magnetic properties of about 1% on cold substrates comparable to erosion zones on the target in surface area.
ISSN:1063-7842
1090-6525
DOI:10.1134/S1063784208030195