Properties of Ti coatings deposited by high-power ion beams

Titanium coatings are deposited on a Si substrate by their deposition from ablation plasma produced by irradiating a Ti target with high-power ion beams. The dependences of the adhesion, nanohardness, Young’s modulus, and friction coefficient on the distance between the sputtered target and the subs...

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Bibliographic Details
Published in:Inorganic materials : applied research 2012-05, Vol.3 (3), p.220-225
Main Authors: Struts, V. K., Matvienko, V. M., Petrov, A. V., Ryabchikov, A. I.
Format: Article
Language:English
Subjects:
Chemistry
Chemistry and Materials Science
Functional Coatings and Surface Treatment
Industrial Chemistry/Chemical Engineering
Inorganic Chemistry
Materials Science
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Summary:Titanium coatings are deposited on a Si substrate by their deposition from ablation plasma produced by irradiating a Ti target with high-power ion beams. The dependences of the adhesion, nanohardness, Young’s modulus, and friction coefficient on the distance between the sputtered target and the substrate and on the thickness of the coating are studied for thin-film titanium coatings. The formation of a transition layer with an alternating content of Ti is found to increase coating adhesion.
ISSN:2075-1133
2075-115X
DOI:10.1134/S2075113311030269