Atomistic modeling of thermal effects in focused electron beam-induced deposition of Me$$_2$$Au(tfac)

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Bibliographic Details
Published in:The European physical journal. D, Atomic, molecular, and optical physics Atomic, molecular, and optical physics, 2023-01, Vol.77 (1), Article 15
Main Authors: Prosvetov, Alexey, Verkhovtsev, Alexey V., Sushko, Gennady, Solov’yov, Andrey V.
Format: Article
Language:English
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ISSN:1434-6060
1434-6079
DOI:10.1140/epjd/s10053-023-00598-5