Enhancement mechanism of H- production and suitable configurations for materials processing in a magnetized sheet plasma

A magnetized sheet plasma ion source was developed for steady state high density plasma with strong density and high temperature gradients. This feature provides efficient formation of negative hydrogen (H-) ions over a wide beam extraction area through the electron volume process. A hexapole confin...

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Bibliographic Details
Published in:International Journal of Modern Physics: Conference Series 2014, Vol.32, p.1460339
Main Authors: Ramos, Henry J., Villamayor, Michelle Marie S., Mella, Aubrey Faith M., Salamania, Janella Mae R., Villanueva, Matthew Bryan P., Viloan, Rommel Paulo B.
Format: Article
Language:English
Subjects:
Configurations
Density
High temperature
Ion sources
Magnesium
Materials processing
Temperature gradients
Tin dioxide
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Summary:A magnetized sheet plasma ion source was developed for steady state high density plasma with strong density and high temperature gradients. This feature provides efficient formation of negative hydrogen (H-) ions over a wide beam extraction area through the electron volume process. A hexapole confinement at the cathode, addition of argon and magnesium seeding led to the increase of H- yield. The device configuration is suitable for plasma based materials processing namely, synthesis of TiN, SiH, SnO2, and the formation of advanced MAX phase materials Ti2AlC, Ti2CdC and NbAlC.
ISSN:2010-1945
2010-1945
DOI:10.1142/S2010194514603391