Deformation Induced Holes in Ge-Rich SiGe-on-Insulator and Ge-on-Insulator Substrates Fabricated by Ge Condensation Process

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Bibliographic Details
Published in:Applied physics express 2008-10, Vol.1, p.101401
Main Authors: Hirashita, Norio, Moriyama, Yoshihiko, Nakaharai, Shu, Irisawa, Toshifumi, Sugiyama, Naoharu, Takagi, Shin-ichi
Format: Article
Language:English
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ISSN:1882-0778
1882-0786
DOI:10.1143/APEX.1.101401